Thickness dependence of hydrogen in a-Si : H films deposited on c-Si J.F. Currie, P. Depelsenaire, S. Galarneau, J. L'Ecuyer, R. Groleau, J.C. Bruyère et A. DeneuvilleJ. Physique Lett., 42 15 (1981) 373-376DOI: https://doi.org/10.1051/jphyslet:019810042015037300
