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Characterization of Ar/N2/H2middle-pressure RF discharge and application of the afterglow region for nitridation of GaAs

J Raud, I Jõgi, L Matisen, et al.
Journal of Physics D: Applied Physics 50 (50) 505201 (2017)
https://doi.org/10.1088/1361-6463/aa9635

Rotational temperatures of N2(C,0) and OH(A,0) as gas temperature estimates in the middle pressure Ar/O2 discharge

J Raud, M Laan and I Jõgi
Journal of Physics D: Applied Physics 44 (34) 345201 (2011)
https://doi.org/10.1088/0022-3727/44/34/345201

Neutral gas temperatures measured within a high-density, inductively coupled plasma abatement device

Eric J. Tonnis and David B. Graves
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 20 (5) 1787 (2002)
https://doi.org/10.1116/1.1503901

Collision energy dependence of the cross sections for the electronic excitation transfer reactions: Rg(3P0,2)+N2(X 1Σg)→Rg(1S0) +N2(C 3Πu) (Rg=Ar, Kr)

Kiyohiko Tabayashi and Kosuke Shobatake
The Journal of Chemical Physics 84 (9) 4919 (1986)
https://doi.org/10.1063/1.450822

Symmetries, propensity rules, and alternation intensity in the rotational spectrum of N2 (C 3Πu) excited by metastables Ar(3P0,2)

J. Derouard, T. D. Nguyen and N. Sadeghi
The Journal of Chemical Physics 72 (12) 6698 (1980)
https://doi.org/10.1063/1.439129